Industry: Semiconductor Manufacturing.
Challenge: Transform a small, semi-automatic single wafer wet processing machine into a fully automated, floor-standing fabrication system capable of multi-wafer processing, incorporating a wafer handling robot sorter while ensuring true single-sided processing without contamination.
Solution: Vertex led the design, engineering, and integration of the WaveEtch™ 456G2, delivering a fully automated cassette-to-cassette system for substrates from 1″ to 12″. The solution included mechanical and electrical engineering, GUI programming, and integration of a Genmark EFEM mini environment robot, with Vertex fabricating the first two units and managing on-site fab installation.
Outcome: The WaveEtch™ 456G2 set new standards in semiconductor fabrication with its robust automation, precise single-sided wet processing, and seamless integration, achieving enhanced efficiency, reliability, and scalability for high-volume production environments.
Wavetech 456 G2