The WaveEtch 456 G2 Machine represents a significant achievement for Vertex Product Development, stemming from a collaboration with Matech to enhance their existing technology. Initially a small countertop semi-automatic single wafer wet processing machine, Matech sought to scale up the system into a fully automated floor-standing fab machine with multi-wafer processing capabilities and a wafer handling robot sorter.
The resulting WaveEtch™ 456G2 system boasts impressive features, including fully automated cassette-to-cassette processing of substrates ranging from 1" to 12" in size. Importantly, it achieves true single-sided wet processing without disturbing or contaminating the unprocessed side of the substrates.
Vertex played a central role in this project, overseeing various aspects of design, engineering, and integration. This included the overall design and appearance of the WaveEtch™ 456G2, mechanical and electrical engineering, programming and GUI design, and complete system integration with a Genmark EFEM mini environment robot unit.
Furthermore, Vertex engineers took charge of fabricating the first two WaveEtch™ 456G2 units and managing on-site fab installation, ensuring a seamless transition to operational use. Through meticulous attention to detail and comprehensive expertise, Vertex contributed to the realization of this groundbreaking wet processing machine, setting new standards for efficiency and functionality in semiconductor fabrication.